Template fabrication schemes for step and flash imprint lithography
Bailey, T.C., Resnick, D.J., Mancini, D., Nordquist, K.J., Dauksher, W.J., Ainley, E., Talin, A., Gehoski, K., Baker, J.H., Choi, B.J., Johnson, S., Colburn, M., Meissl, M., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.07.2002)
Published in Microelectronic engineering (01.07.2002)
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Journal Article
Conference Proceeding
Ramifications of lubrication theory on imprint lithography
Colburn, Matthew, Choi, Byung Jin, Sreenivasan, S.V., Bonnecaze, Roger T., Grant Willson, C.
Published in Microelectronic engineering (01.09.2004)
Published in Microelectronic engineering (01.09.2004)
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Journal Article
Process control for 32 nm imprint masks using variable shape beam pattern generators
Thompson, Ecron, Selinidis, Kosta, Maltabes, John G., Resnick, Douglas J., Sreenivasan, S.V.
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
Distortion and overlay performance of UV step and repeat imprint lithography
Choi, Jin, Nordquist, Kevin, Cherala, Ashuman, Casoose, Lester, Gehoski, Kathy, Dauksher, William J., Sreenivasan, S.V., Resnick, Douglas J.
Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
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Conference Proceeding
Fabrication of multi-tiered structures on step and flash imprint lithography templates
Johnson, S., Resnick, D.J., Mancini, D., Nordquist, K., Dauksher, W.J., Gehoski, K., Baker, J.H., Dues, L., Hooper, A., Bailey, T.C., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.06.2003)
Published in Microelectronic engineering (01.06.2003)
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Conference Proceeding
Design of orientation stages for step and flash imprint lithography
Choi, B.J., Sreenivasan, S.V., Johnson, S., Colburn, M., Wilson, C.G.
Published in Precision engineering (01.07.2001)
Published in Precision engineering (01.07.2001)
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A framework for rapid local area modeling for construction automation
Cho, Yong-Kwon, Haas, Carl T, Liapi, Katherine, Sreenivasan, S.V
Published in Automation in construction (01.10.2002)
Published in Automation in construction (01.10.2002)
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