Radio-frequency coil for use in an ionized physical vapor deposition apparatus
SIMON ANDREW HERBERT, SMETANA PAVEL, ROSSNAGEL STEPHEN MARK, RESTAINO DARRYL D
Year of Publication 29.05.2001
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Year of Publication 29.05.2001
Patent
Wafer clamp ring for use in an ionized physical vapor deposition apparatus
SIMON ANDREW HERBERT, COONEY, III EDWARD C, SMETANA PAVEL, RESTAINO DARRYL D, ROSSNAGEL STEPHEN MARK
Year of Publication 23.01.2001
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Year of Publication 23.01.2001
Patent