Cathode assembly for sputtering a rotatable tubular target
SAUER, ANDREAS, MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 30.12.2011
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Year of Publication 30.12.2011
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Cathode assembly for sputtering a rotatable tubular target
SAUER, ANDREAS, MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 03.08.2011
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Year of Publication 03.08.2011
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Cathode arrangement for atomizing a rotatable target pipe
MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 11.11.2007
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Year of Publication 11.11.2007
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Cathode assembly for sputtering a rotatable tubular target
SAUER, ANDREAS, MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 29.02.2008
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Year of Publication 29.02.2008
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CATHODE ASSEMBLY FOR SPUTTERING A ROTATABLE TUBULAR TARGET
ANDREAS SAUER, DIETMAR MARQUARDT, TOM RISO, SCOTT TRUBE, RICHARD NEWCOMB, KEN KAWAKAMI
Year of Publication 10.12.2007
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Year of Publication 10.12.2007
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KATODENANORDNUNG ZUR ZERSTÄUBUNG EINES DREHBAREN TARGETROHRES
SAUER, ANDREAS, MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 15.10.2007
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Year of Publication 15.10.2007
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Cathode assembly for sputtering a rotatable tubular target
SAUER, ANDREAS, MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 26.09.2007
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Year of Publication 26.09.2007
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CATHODE APPARATUS FOR SPATTERING ONTO ROTATABLE TARGET PIPE
KAWAKAMI KEN, MARQUARDT DIETMAR, SAUER ANDREAS, TRUBE SCOTT, RISO TOM, NEWCOMB RICHARD
Year of Publication 25.05.2006
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Year of Publication 25.05.2006
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CATHODE ARRANGEMENT FOR SPUTTERING A ROTATABLE TARGET PIPE
KAWAKAMI KEN, MARQUARDT DIETMAR, SAUER ANDREAS, TRUBE SCOTT, RISO TOM, NEWCOMB RICHARD
Year of Publication 19.05.2006
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Year of Publication 19.05.2006
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Cathode arrangement for atomizing a rotatable target pipe
KAWAKAMI KEN, MARQUARDT DIETMAR, SAUER ANDREAS, TRUBE SCOTT, RISO TOM, NEWCOMB RICHARD
Year of Publication 11.05.2006
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Year of Publication 11.05.2006
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Cathode assembly for sputtering a rotatable tubular target
SAUER, ANDREAS, MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 10.05.2006
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Year of Publication 10.05.2006
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Cathode arrangement for atomizing a rotatable target pipe
NEWCOMB RICHARD,TRUBE SCOTT,RISO TOM,KAWAKAMI KEN,MARQUARDT DIETMAR,SAUER ANDREAS
Year of Publication 10.05.2006
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Year of Publication 10.05.2006
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DISPOSITIVO CATODICO PARA LA PULVERIZACION DE UN OBJETIVO TUBULAR GIRATORIO
SAUER, ANDREAS, MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 23.12.2011
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Year of Publication 23.12.2011
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Cathode arrangement for atomizing a rotatable target pipe
KAWAKAMI KEN, MARQUARDT DIETMAR, SAUER ANDREAS, TRUBE SCOTT, RISO TOM, NEWCOMB RICHARD
Year of Publication 09.09.2009
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Year of Publication 09.09.2009
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DISPOSITIVO CATODICO PARA LA PULVERIZACION DE UN TUBO DE OBJETIVO TUBULAR GIRATORIO
SAUER, ANDREAS, MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 01.04.2008
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Year of Publication 01.04.2008
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Cathode arrangement for atomizing a rotatable target pipe
SAUER, ANDREAS, MARQUARDT, DIETMAR, NEWCOMB, RICHARD, KAWAKAMI, KEN, RISO, TOM, TRUBE, SCOTT
Year of Publication 16.05.2006
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Year of Publication 16.05.2006
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