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Semiconductor device including dual damascene interconnections

Semiconductor device including dual damascene interconnections

by Clevenger, Lawrence A, Nesbit, Larry A
Year of Publication 06.03.2007

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Patent

Method for producing dual damascene interconnections and structure produced thereby

Method for producing dual damascene interconnections and structure produced thereby

by Clevenger, Lawrence A, Nesbit, Larry A
Year of Publication 06.07.2004

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Patent

Carbon nanotube conductor for trench capacitors

Carbon nanotube conductor for trench capacitors

by Holmes, Steven J, Furukawa, Toshiharu, Hakey, Mark C, Horak, David V, Koburger, III, Charles W, Nesbit, Larry A
Year of Publication 26.04.2011

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Patent

Structure and method of forming bitline contacts for a vertical DRAM array using a line bitline contact mask

Structure and method of forming bitline contacts for a vertical DRAM array using a line bitline contact mask

by Nesbit, Larry A, Faltermeier, Jonathan E, Divakaruni, Ramachandra, Bergner, Wolfgang
Year of Publication 27.07.2004

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Patent

Method for fabricating oxygen-implanted silicon on insulation type semiconductor and semiconductor formed therefrom

Method for fabricating oxygen-implanted silicon on insulation type semiconductor and semiconductor formed therefrom

by Furukawa, Toshiharu, Hakey, Mark C, Holmes, Steven J, Horak, David V, Koburger, III, Charles W, Nesbit, Larry A
Year of Publication 17.03.2009

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Patent

Structure and method of forming bitline contacts for a vertical DRAM array using a line bitline contact mask

Structure and method of forming bitline contacts for a vertical DRAM array using a line bitline contact mask

by Nesbit, Larry A, Faltermeier, Johnathan E, Divakaruni, Ramachandra, Bergner, Wolfgang
Year of Publication 03.02.2004

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Patent

Shrinking contact apertures through LPD oxide

Shrinking contact apertures through LPD oxide

by Furukawa, Toshiharu, Hakey, Mark C, Holmes, Steven J, Horak, David V, Koburger, III, Charles W, Nesbit, Larry A
Year of Publication 01.07.2008

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Patent

Sub-lithographic imaging techniques and processes

Sub-lithographic imaging techniques and processes

by Furukawa, Toshiharu, Hakey, Mark C, Holmes, Steven J, Horak, David V, Koburger, III, Charles W, Mitchell, Peter H, Nesbit, Larry A, Slinkman, James A
Year of Publication 08.09.2009

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Patent

Process for oxide cap formation in semiconductor manufacturing

Process for oxide cap formation in semiconductor manufacturing

by Holmes, Steven J, Furukawa, Toshiharu, Hakey, Mark C, Horak, David V, Koburger, III, Charles W, Nesbit, Larry A
Year of Publication 14.08.2007

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Patent

Double-gate FETs (Field Effect Transistors)

Double-gate FETs (Field Effect Transistors)

by Furukawa, Toshiharu, Hakey, Mark C, Holmes, Steven J, Horak, David V, Koburger, III, Charles W, Mitchell, Peter H, Nesbit, Larry A
Year of Publication 31.07.2007

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Patent

Alternating phase mask built by additive film deposition

Alternating phase mask built by additive film deposition

by Furukawa, Toshiharu, Hakey, Mark C, Holmes, Steven J, Horak, David V, Koburger, III, Charles W, Mitchell, Peter H, Nesbit, Larry A
Year of Publication 14.02.2006

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Patent

Method of forming gas dielectric with support structure

Method of forming gas dielectric with support structure

by Furukawa, Toshiharu, Hakey, Mark C, Horak, David V, Koburger, III, Charles W, Mitchell, Peter H, Nesbit, Larry A, Slinkman, James A
Year of Publication 05.04.2005

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Patent