Lithographic apparatus and method
Mulder, Heine Melle, Hageman, Joost Cyrillus Lambert, Stas, Roland Johannes Wilhelmus
Year of Publication 05.06.2012
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Year of Publication 05.06.2012
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Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels
Loopstra, Erik Roelof, Bleeker, Arno Jan, Mulder, Heine Melle, Noordman, Oscar Franciscus Jozephus, Sengers, Timotheus Franciscus, Jorritsma, Laurentius Catrinus, Trentelman, Mark, Streutker, Gerrit
Year of Publication 12.04.2011
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Year of Publication 12.04.2011
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Lithographic apparatus, device manufacturing method and computer program product
Stoeldraijer, Judocus Marie Dominicus, Loopstra, Erik Roelof, Mulder, Heine Melle, Sengers, Timotheus Franciscus, Stoffels, Freerk Adriaan, Jorritsma, Laurentius Catrinus, Jungblut, Reiner Maria
Year of Publication 08.03.2011
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Year of Publication 08.03.2011
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Lithographic apparatus having masking parts and device manufacturing method
Loopstra, Erik Roelof, Bleeker, Arno Jan, Mulder, Heine Melle, Noordman, Oscar Franciscus Jozephus, Sengers, Timotheus Franciscus, Jorritsma, Laurentius Catrinus, Trentelman, Mark, Streutker, Gerrit
Year of Publication 02.03.2010
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Year of Publication 02.03.2010
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System and method for uniformity correction
Zimmerman, Richard C, Catey, Eric B, Hult, David A, Kremer, Alexander C, Mulder, Heine Melle, Van Greevenbroek, Hendrikus Robertus Marie, Wiener, Roberto B
Year of Publication 28.04.2009
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Year of Publication 28.04.2009
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Lithographic apparatus, device manufacturing method, and device manufactured thereby
Mulkens, Johannes Catharinus Hubertus, Van Der Veen, Paul, Van Schaik, Willem, Banine, Vadim Yevgenyevich, Bakker, Levinus Pieter, Moors, Johannes Hubertus Josephina, Mulder, Heine Melle
Year of Publication 24.03.2009
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Year of Publication 24.03.2009
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Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product
Mulder, Heine Melle, Van Schoot, Jan Bernard Plechelmus, Eurlings, Markus Franciscus Antonius, Van Dijsseldonk, Antonius Johannes Josephus, Dierichs, Marcel
Year of Publication 18.05.2004
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Year of Publication 18.05.2004
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Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
Luijkx, Cornelis Petrus Andreas Marie, Banine, Vadim Yevgenyevich, Botma, Hako, Van Duijnhoven, Martinus, Eurlings, Markus Franciscus Antonius, Mulder, Heine Melle, Muijderman, Johannes Hendrik Everhardus Aldegonda, Van Duijn, Cornelis Jacobus, Krikke, Jan Jaap
Year of Publication 18.04.2006
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Year of Publication 18.04.2006
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