Method to eliminate arsenic contamination in trench capacitors
Fleming, Jr, Marshall J, Ishaq, Mousa H, Shank, Steven M, Triplett, Michael C
Year of Publication 21.04.2009
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Year of Publication 21.04.2009
Patent
Method to eliminate arsenic contamination in trench capacitors
Fleming, Jr, Marshall J, Ishaq, Mousa H, Shank, Steven M, Triplett, Michael C
Year of Publication 13.11.2007
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Year of Publication 13.11.2007
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Semiconductor metal contamination reduction for ultra-thin gate dielectrics
Burnham, Jay S, Elliott, James R, Gault, Kenneth R, Ishaq, Mousa H, Shank, Steven M, St. Lawrence, Mary A
Year of Publication 11.03.2008
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Year of Publication 11.03.2008
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Backside protection films
Baker, Faye D, Grant, Casey J, Ishaq, Mousa H, Sharrow, Joel M, Weil, James D
Year of Publication 30.12.2003
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Year of Publication 30.12.2003
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