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Year of Publication 16.10.2007
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Method of manufacturing a semiconductor device having trenches for isolation and capacitor formation trenches
Okazaki, Tsutomu, Okada, Daisuke, Ikeda, Yoshihiro, Tsukamoto, Keisuke, Fukumura, Tatsuya, Shukuri, Shoji, Haraguchi, Keiichi, Kishi, Koji
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Year of Publication 21.03.2006
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