Methods for forming line patterns in semiconductor substrates
Choi, Sang-jun, Kang, Yool, Moon, Joo-tae, Chung, Jeong-hee, Woo, Sang-gyun
Year of Publication 12.10.2004
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Year of Publication 12.10.2004
Patent
Methods of forming metal-insulator-metal (MIM) capacitors with separate seed
Choi, Jae-hyoung, Kim, Sung-tae, Kim, Ki-chul, Yoo, Cha-young, Chung, Jeong-hee, Oh, Se-hoon, Choi, Jeong-sik
Year of Publication 01.01.2008
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Year of Publication 01.01.2008
Patent
Methods for forming line patterns in semiconductor substrates
Choi, Sang-jun, Kang, Yool, Moon, Joo-tae, Chung, Jeong-hee, Woo, Sang-gyun
Year of Publication 26.11.2002
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Year of Publication 26.11.2002
Patent