Method for manufacturing semiconductor device
Shin, Cheol Ho, Cho, Byoung Ha, Sim, Sang Tae, Kim, Jung Soo, Lee, Won Hyung, Kim, Dae Sik
Year of Publication 14.10.2008
Get full text
Year of Publication 14.10.2008
Patent
Method for atomic layer deposition (ALD) of silicon oxide film
Cho, Byoung Ha, Kim, Yong Il, Shin, Cheol Ho, Lee, Won Hyung, Kim, Jung Soo, Sim, Sang Tae
Year of Publication 18.07.2006
Get full text
Year of Publication 18.07.2006
Patent