Squeeze-film air damping of thick hole-plate
Bao, Minhang, Yang, Heng, Sun, Yuancheng, Wang, Yuelin
Published in Sensors and actuators. A, Physical (15.11.2003)
Published in Sensors and actuators. A, Physical (15.11.2003)
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Journal Article
Conference Proceeding
Friction and wear properties in MEMS
Wang, Weiyuan, Wang, Yuelin, Bao, Haifei, Xiong, Bin, Bao, Minhang
Published in Sensors and actuators. A, Physical (01.04.2002)
Published in Sensors and actuators. A, Physical (01.04.2002)
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Journal Article
Conference Proceeding
Self-excited piezoelectric microcantilever for gas detection
Zhou, Jia, Li, Po, Zhang, Song, Huang, Yiping, Yang, Pengyuan, Bao, Minhang, Ruan, Gang
Published in Microelectronic engineering (01.08.2003)
Published in Microelectronic engineering (01.08.2003)
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Journal Article
Effects of electrostatic forces generated by the driving signal on capacitive sensing devices
Bao, Minhang, Yang, Heng, Yin, Hao, Shen, Shaoqun
Published in Sensors and actuators. A. Physical. (01.09.2000)
Published in Sensors and actuators. A. Physical. (01.09.2000)
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Journal Article
A novel bulk micromachined gyroscope based on a rectangular beam-mass structure
Yang, Heng, Bao, Minhang, Yin, Hao, Shen, Shaoqun
Published in Sensors and actuators. A. Physical. (28.02.2002)
Published in Sensors and actuators. A. Physical. (28.02.2002)
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Journal Article
A fast and accurate calibration method for high sensitivity pressure transducers
Bao, Minhang, Sun, Yuancheng, Yang, Heng, Wang, Jinsuo
Published in Sensors and actuators. A, Physical (15.11.2003)
Published in Sensors and actuators. A, Physical (15.11.2003)
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Journal Article
Conference Proceeding
A micromachined piezoresistive angular rate sensor with a composite beam structure
Li, Xinxin, Bao, Minhang, Yang, Heng, Shen, Shaoqun, Lu, Deren
Published in Sensors and actuators. A. Physical. (16.02.1999)
Published in Sensors and actuators. A. Physical. (16.02.1999)
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Journal Article
Over-range capacity of a piezoresistive microaccelerometer
Chen, Hong, Shen, Shaoqun, Bao, Minhang
Published in Sensors and actuators. A. Physical. (01.03.1997)
Published in Sensors and actuators. A. Physical. (01.03.1997)
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Journal Article
Study on linearization of silicon capacitive pressure sensors
Li, Xinxin, Bao, Minhang, Shen, Shaoqun
Published in Sensors and actuators. A. Physical. (01.09.1997)
Published in Sensors and actuators. A. Physical. (01.09.1997)
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Journal Article
A novel technique for measuring etch rate distribution of Si
Yang, Heng, Bao, Minhang, Shen, Shaoqun, Li, Xinxin, Zhang, Dacheng, Wu, Guoyin
Published in Sensors and actuators. A. Physical. (01.02.2000)
Published in Sensors and actuators. A. Physical. (01.02.2000)
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Journal Article
A pressure transducer with a single-sided multilevel structure by maskless etching technology
Yang, Heng, Shen, Shaoqun, Bao a, Minhang, Ren, Jianjun, Shen, Jiaying, Lu, Deren
Published in Mechatronics (Oxford) (01.08.1998)
Published in Mechatronics (Oxford) (01.08.1998)
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Journal Article
Zeolite-modified microcantilever gas sensor for indoor air quality control
Zhou, Jia, Li, Po, Zhang, Song, Long, Yingcai, Zhou, Feng, Huang, Yiping, Yang, Pengyuan, Bao, Minhang
Published in Sensors and actuators. B, Chemical (01.10.2003)
Published in Sensors and actuators. B, Chemical (01.10.2003)
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Journal Article
Reliable operation conditions of capacitive inertial sensor for step and shock signals
Bao, Minhang, Huang, Yiping, Yang, Heng, Wang, Yuelin
Published in Sensors and actuators. A. Physical. (20.08.2004)
Published in Sensors and actuators. A. Physical. (20.08.2004)
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Journal Article
Reliable operation conditions of capacitive inertial sensor for step and shock signals
Bao, Minhang, Huang, Yiping, Yang, Heng, Wang, Yuelin
Published in Sensors and actuators. A. Physical. (20.08.2004)
Published in Sensors and actuators. A. Physical. (20.08.2004)
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Journal Article
A piezoresistive accelerometer with a novel vertical beam structure
Chen, Hong, Bao, Minhang, Zhu, Haijun, Shen, Shaoqun
Published in Sensors and actuators. A. Physical. (01.09.1997)
Published in Sensors and actuators. A. Physical. (01.09.1997)
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