A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists
Chuang, Yun-Ju, Tseng, Fan-Gang, Cheng, Jen-Hau, Lin, Wei-Keng
Published in Sensors and actuators. A, Physical (15.01.2003)
Published in Sensors and actuators. A, Physical (15.01.2003)
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Journal Article
Conference Proceeding
Atomic layer deposition enabled interconnect technology for vertical nanowire arrays
Cheng, Jen-Hau, Seghete, Dragos, Lee, Myongjai, Schlager, John B., Bertness, Kris A., Sanford, Norman A., Yang, Ronggui, George, Steven M., Lee, Y.C.
Published in Sensors and actuators. A. Physical. (2011)
Published in Sensors and actuators. A. Physical. (2011)
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Journal Article