Integrating atomic layer deposition and ultra-high vacuum physical vapor deposition for in situ fabrication of tunnel junctions
Elliot, Alan J, Malek, Gary A, Lu, Rongtao, Han, Siyuan, Yu, Haifeng, Zhao, Shiping, Wu, Judy Z
Published in Review of scientific instruments (01.07.2014)
Published in Review of scientific instruments (01.07.2014)
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Journal Article
Atomic Layer Deposition of Al-Doped ZnO/Al2O3 Double Layers on Vertically Aligned Carbon Nanofiber Arrays
Malek, Gary A, Brown, Emery, Klankowski, Steven A, Liu, Jianwei, Elliot, Alan J, Lu, Rongtao, Li, Jun, Wu, Judy
Published in ACS applied materials & interfaces (14.05.2014)
Published in ACS applied materials & interfaces (14.05.2014)
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