Chapter 21 - Deep Reactive Ion Etching
Laermer, Franz, Franssila, Sami, Sainiemi, Lauri, Kolari, Kai
Published in Handbook of Silicon Based MEMS Materials and Technologies (2016)
Published in Handbook of Silicon Based MEMS Materials and Technologies (2016)
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Book Chapter
Deep Reactive Ion Etching
Lindroos Veikko, Lehto Ari, Tilli Markku, Motooka Teruaki
Published in Handbook of Silicon Based MEMS Materials and Technologies (2010)
Published in Handbook of Silicon Based MEMS Materials and Technologies (2010)
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Book Chapter