TiN/TiSi2 formation using TiNx layer and its feasibilities in ULSI
JEONG SOO BYUN, CHANG REOL KIM, KWAN GOO RHA, JAE JEONG KIM, WOO SHIK KIM
Published in Japanese journal of applied physics (1995)
Published in Japanese journal of applied physics (1995)
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Conference Proceeding
TiN/TiSi 2 Formation Using TiN x Layer and Its Feasibilities in ULSI
Byun, Jeong Soo, Kim, Chang Reol, Rha, Kwan Goo, Kim, Jae Jeong, Woo Shik Kim, Woo Shik Kim
Published in Japanese Journal of Applied Physics (01.02.1995)
Published in Japanese Journal of Applied Physics (01.02.1995)
Get full text
Journal Article