A stacked memory device on logic 3D technology for ultra-high-density data storage
Kim, Jiyoung, Hong, Augustin J, Kim, Sung Min, Shin, Kyeong-Sik, Song, Emil B, Hwang, Yongha, Xiu, Faxian, Galatsis, Kosmas, Chui, Chi On, Candler, Rob N, Choi, Siyoung, Moon, Joo-Tae, Wang, Kang L
Published in Nanotechnology (24.06.2011)
Published in Nanotechnology (24.06.2011)
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Journal Article
Synchronous Pulse Plasma Operation upon Source and Bias Radio Frequencys for Inductively Coupled Plasma for Highly Reliable Gate Etching Technology
Tokashiki, Ken, Cho, Hong, Banna, Samer, Lee, Jeong-Yun, Shin, Kyoungsub, Todorow, Valentin, Kim, Woo-Seok, Bai, KeunHee, Joo, Sukho, Choe, Jeong-Dong, Ramaswamy, Kartik, Agarwal, Ankur, Rauf, Shahid, Collins, Ken, Choi, SangJun, Cho, Han, Kim, Hyun Joong, Lee, Changhun, Lymberopoulos, Dimitris, Yoon, Junho, Han, Woosung, Moon, Joo-Tae
Published in Japanese Journal of Applied Physics (01.08.2009)
Published in Japanese Journal of Applied Physics (01.08.2009)
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Journal Article
Leakage Current Reduction Mechanism of Oxide--Nitride--Oxide Inter-Poly Dielectrics through the Post Plasma Oxidation Treatment
Lee, Woong, Jee, Jeonggeun, Yoo, Dae-Han, Lee, Eun-Young, Bok, Jinkwon, Hyung, Younwoo, Kim, Seoksik, Kang, Chang-Jin, Moon, Joo-Tae, Roh, Yonghan
Published in Japanese Journal of Applied Physics (01.04.2011)
Published in Japanese Journal of Applied Physics (01.04.2011)
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Journal Article
Low-Temperature Solid Phase Epitaxial Regrowth of Silicon for Stacked Static Random Memory Application
Lee, Kong-Soo, Yeo, Chadong, Yoo, Dae-Han, Kim, Seok-Sik, Moon, Joo-Tae, Jung, Soon-Moon, Son, Yong-Hoon, Park, Hyunho, Jeong, Hanwook, Kim, Kwang-Ryul, Choi, Byoungdeog
Published in Japanese Journal of Applied Physics (01.01.2011)
Published in Japanese Journal of Applied Physics (01.01.2011)
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Journal Article
Most Efficient Alternative Manner of Patterning sub-80 nm Contact Holes and Trenches with 193 nm Lithography
Hah, Jung Hwan, Yoon, Jin-Young, Hata, Mitsuhiro, Kim, Sang Wook, Kim, Hyun-Woo, Woo, Sang-Gyoun, Cho, Han-Ku, Han, Woo-Sung, Moon, Joo-Tae, Ryu, Byoung-Il
Published in Japanese Journal of Applied Physics (01.06.2004)
Published in Japanese Journal of Applied Physics (01.06.2004)
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Journal Article
Investigation of Chemical Vapor Deposition (CVD)-Derived Cobalt Silicidation for the Improvement of Contact Resistance
Kim, Hyun-Su, Yun, Jong-Ho, Moon, Kwang-Jin, Sohn, Woong-Hee, Jung, Sug-Woo, Jung, Eun-Ji, Kim, Se-Hoon, Bae, Nam-Jin, Choi, Gil-Heyun, Kim, Sung-Tae, Chung, U-In, Moon, Joo-Tae, Ryu, Byung-Il
Published in Japanese Journal of Applied Physics (01.06.2005)
Published in Japanese Journal of Applied Physics (01.06.2005)
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Journal Article
Performance of DRAM Cell Transistor with Thermal Desorption Silicon Etching (TDSE) and Selective Si Channel Epi Techniques
Kim, Chul-Sung, Ku, Ja-Hum, Lee, Byeong-Chan, Yoo, Jong-Ryeol, Lee, Deok-Hyung, Choi, Siyoung, Chung, U-In, Moon, Joo-Tae
Published in Japanese Journal of Applied Physics (2003)
Published in Japanese Journal of Applied Physics (2003)
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Journal Article
Plasma-Assisted Dry Etching of Ferroelectric Capacitor Modules and Application to a 32M Ferroelectric Random Access Memory Devices with Submicron Feature Sizes
Lee, Sang-Woo, Joo, Suk-Ho, Cho, Sung Lae, Son, Yoon-Ho, Lee, Kyu-Mann, Nam, Sang-Don, Park, Kun-Sang, Lee, Yong-Tak, Seo, Jung-Suk, Kim, Young-Dae, An, Hyeong-Geun, Kim, Hyoung-Joon, Jung, Yong-Ju, Heo, Jang-Eun, Lee, Moon-Sook, Park, Soon-Oh, Chung, U-In, Moon, Joo-Tae
Published in Japanese Journal of Applied Physics (01.01.2002)
Published in Japanese Journal of Applied Physics (01.01.2002)
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Journal Article
Selective Epitaxial Growth of Silicon for Vertical Diode Application
Lee, Kong-Soo, Yoo, Dae-Han, Han, Jae-Jong, Hyung, Yong-Woo, Kim, Seok-Sik, Kang, Chang-Jin, Jeong, Hong-Sik, Moon, Joo-Tae, Park, Hyunho, Jeong, Hanwook, Kim, Kwang-Ryul, Choi, Byoungdeog
Published in Japanese Journal of Applied Physics (01.08.2010)
Published in Japanese Journal of Applied Physics (01.08.2010)
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Journal Article
Leakage Current Reduction Mechanism of Oxide–Nitride–Oxide Inter-Poly Dielectrics through the Post Plasma Oxidation Treatment
Lee, Woong, Jee, Jeonggeun, Yoo, Dae-Han, Lee, Eun-Young, Bok, Jinkwon, Hyung, Younwoo, Kim, Seoksik, Kang, Chang-Jin, Moon, Joo-Tae, Roh, Yonghan
Published in Japanese Journal of Applied Physics (01.04.2011)
Published in Japanese Journal of Applied Physics (01.04.2011)
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Journal Article
Low-Temperature Solid Phase Epitaxial Regrowth of Silicon for Stacked Static Random Memory Application
Lee, Kong-Soo, Yeo, Chadong, Yoo, Dae-Han, Kim, Seok-Sik, Moon, Joo-Tae, Jung, Soon-Moon, Son, Yong-Hoon, Park, Hyunho, Jeong, Hanwook, Kim, Kwang-Ryul, Choi, Byoungdeog
Published in Japanese Journal of Applied Physics (01.01.2011)
Published in Japanese Journal of Applied Physics (01.01.2011)
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Journal Article
Selective Epitaxial Growth of Silicon Layer Using Batch-Type Equipment for Vertical Diode Application to Next Generation Memories
Lee, Kong-Soo, Yoo, Dae-Han, Yoo, Young-Sub, Han, Jae-Jong, Kim, Seok-Sik, Jeong, Hong-Sik, Kang, Chang-Jin, Moon, Joo-Tae, Park, Hyunho, Jeong, Hanwook, Kim, Kwang-Ryul, Choi, Byoungdeog
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Journal Article
Hot-Spot Detection and Correction Using Full-Chip-Based Process Window Analysis
Kim, Sang-Wook, Suh, Sung-Soo, Chun, Yong-Jin, Kim, Young-Chang, Lee, Suk-Joo, Lee, Jung-Hyeon, Choi, Sung-Woon, Kang, Chang-Jin, Han, Woo-Sung, Moon, Joo-Tae
Published in Japanese Journal of Applied Physics (01.06.2008)
Published in Japanese Journal of Applied Physics (01.06.2008)
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Journal Article
Effects of Post-Deposition Annealing on the Electrical Properties of HfSiO Films Grown by Atomic Layer Deposition
Cho, Hag-Ju, Lee, Hye Lan, Park, Hong Bae, Jeon, Taek Soo, Park, Seong Geon, Jin, Beom Jun, Kang, Sang Bom, Shin, Yu Gyun, Chung, U-In, Moon, Joo Tae
Published in Japanese Journal of Applied Physics (01.04.2005)
Published in Japanese Journal of Applied Physics (01.04.2005)
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Journal Article
Double-Patterning Technique Using Plasma Treatment of Photoresist
Lee, Doo-Youl, Kang, Yool, Chae, Yun-Sook, Lee, Suk-Joo, Cho, Han-Ku, Moon, Joo-Tae
Published in Japanese Journal of Applied Physics (01.09.2007)
Published in Japanese Journal of Applied Physics (01.09.2007)
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Journal Article
Investigation of the Contact Resistance between Ti/TiN and Ru in Metal-1/Plate Contacts of Ruthenium Insulator Silicon Capacitor
Yun, Ju Young, Kim, Byung Hee, Seo, Jung Hun, Lee, Jong Myeong, Kang, Sang Bom, Choi, Gil Heyun, Chung, U In, Moon, Joo Tae
Published in Japanese Journal of Applied Physics (2003)
Published in Japanese Journal of Applied Physics (2003)
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Journal Article
Interface Analysis of MIM Capacitor Using ZrN Electrodes and ALD-ZrO 2 Dielectrics
Choi, Jae Hyoung, Kim, Younsoo, Lim, Jae Soon, Park, Min Young, Chung, Suk-Jin, Kang, Sang Yeol, Cho, Kyuho, Yoo, Cha Young, Moon, Joo Tae, Lee, Hyung Ik, Kim, Ki Hong, Choi, Hye Ran, Chung, Jaekwan
Published in ECS transactions (01.10.2010)
Published in ECS transactions (01.10.2010)
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Journal Article