Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography
Perez-Morelo, Diego J., Wang, Mingkang, Madhaven, Venkatesh, Sathisivan, Mogana, Tay, Charlie, Aksyuk, Vladimir A.
Published in Journal of microelectromechanical systems (01.06.2023)
Published in Journal of microelectromechanical systems (01.06.2023)
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Journal Article
Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device
Pandian, Mohanraj Soundara, Marigo, Eloi, Shunmugam, Muniandy, Hussain, Rubiyatulniza Binti, Wee Song, Charlie Tay, Bin Jamil Din, Jazril, Chan, Buan Fei, Madhaven, Venkatesh, Kantimahanti, Arjun Kumar, Malik, Aamir Farooq, Jeoti, Varun
Published in 2015 IEEE International Ultrasonics Symposium (IUS) (01.10.2015)
Published in 2015 IEEE International Ultrasonics Symposium (IUS) (01.10.2015)
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Conference Proceeding