Reliability and Thermal Stability of Clustered Vertical Furnace-Grown SiO2 With HfxTayN Metal Gate for Advanced MOS Device Application
Kuei-Shu Chang-Liao, Kuei-Shu Chang-Liao, Chin-Lung Cheng, Chin-Lung Cheng, Chun-Yuan Lu, Chun-Yuan Lu, Bhabani Shankar Sahu, Bhabani Shankar Sahu, Tzu-Chen Wang, Tzu-Chen Wang, Tien-Ko Wang, Tien-Ko Wang, Shang-Feng Huang, Shang-Feng Huang, Wen-Fa Tsai, Wen-Fa Tsai, Chi-Fong Ai, Chi-Fong Ai
Published in IEEE transactions on electron devices (01.02.2007)
Published in IEEE transactions on electron devices (01.02.2007)
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Journal Article
Reliability and Thermal Stability of Clustered Vertical Furnace-Grown \hbox With \hbox\hbox\hbox Metal Gate for Advanced MOS Device Application
Kuei-Shu Chang-Liao, Chin-Lung Cheng, Chun-Yuan Lu, Sahu, B.S., Tzu-Chen Wang, Tien-Ko Wang, Shang-Feng Huang, Wen-Fa Tsai, Chi-Fong Ai
Published in IEEE transactions on electron devices (01.02.2007)
Published in IEEE transactions on electron devices (01.02.2007)
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Journal Article
Reliability and Thermal Stability of Clustered Vertical Furnace-Grown SiO@@d2@ With Hf@@dx@Ta@@dy@N Metal Gate for Advanced MOS Device Application
Chang-Liao, Kuei-Shu, Cheng, Chin-Lung, Lu, Chun-Yuan, Sahu, Bhabani Shankar, Wang, Tzu-Chen, Wang, Tien-Ko, Huang, Shang-Feng, Tsai, Wen-Fa, Ai, Chi-Fong
Published in IEEE transactions on electron devices (01.02.2007)
Published in IEEE transactions on electron devices (01.02.2007)
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Journal Article
Reliability and Thermal Stability of Clustered Vertical Furnace-Grown SiO sub(2) With Hf sub(x)Ta sub(y)N Metal Gate for Advanced MOS Device Application
Chang-Liao, Kuei-Shu, Cheng, Chin-Lung, Lu, Chun-Yuan, Sahu, Bhabani, Wang, Tzu-Chen, Wang, Tien-Ko, Huang, Shang-Feng, Tsai, Wen-Fa, Ai, Chi-Fong
Published in IEEE transactions on electron devices (01.01.2007)
Published in IEEE transactions on electron devices (01.01.2007)
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Journal Article
Reliability and thermal stability of clustered vertical furnace-grown SiO2 with HfxTayN metal gate for advanced MOS device application
CHANG-LIAO, Kuei-Shu, CHENG, Chin-Lung, LU, Chun-Yuan, SHANKAR SAHU, Bhabani, WANG, Tzu-Chen, WANG, Tien-Ko, HUANG, Shang-Feng, TSAI, Wen-Fa, AI, Chi-Fong
Published in IEEE transactions on electron devices (2007)
Published in IEEE transactions on electron devices (2007)
Get full text
Journal Article