High-Angular-Range Electrostatic Rotary Stepper Micromotors Fabricated With SOI Technology
Stranczl, M., Sarajlic, E., Fujita, H., Gijs, M. A. M., Yamahata, C.
Published in Journal of microelectromechanical systems (01.06.2012)
Published in Journal of microelectromechanical systems (01.06.2012)
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