Composite silicide gate electrodes-Interconnections for VLSI device technologies
Geipel, H.J., Ning Hsieh, Ishaq, M.H., Koburger, C.W., White, F.R.
Published in IEEE transactions on electron devices (01.08.1980)
Published in IEEE transactions on electron devices (01.08.1980)
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Journal Article
Composite Silicide Gate Electrodes - Interconnections for VLSI Device Technologies
Geipel, H.J., Ning Hsieh, Ishaq, M.H., Koburger, C.W., White, F.R.
Published in IEEE journal of solid-state circuits (01.08.1980)
Published in IEEE journal of solid-state circuits (01.08.1980)
Get full text
Journal Article