Microactuation of suspended MEMS beams
Gattiker, G., Kaler, K.V.I.S., Mintchev, M.P.
Published in 2005 IEEE International Symposium on Circuits and Systems (ISCAS) (2005)
Published in 2005 IEEE International Symposium on Circuits and Systems (ISCAS) (2005)
Get full text
Conference Proceeding