APPROACH TOWARD ENVIRONMENTAL STABILIZATION OF CHEMICAL AMPLIFICATION RESISTS
ITO, Hiroshi, ENGLAND, William P., SOORIYAKUMARAN, R., CLECAK, Nicholas J., BREYTA, Gregory, HINSBERG, William D., LEE, Hoosung, YOON, Do Y.
Published in Journal of Photopolymer Science and Technology (1993)
Published in Journal of Photopolymer Science and Technology (1993)
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Journal Article
CHEMICAL AMPLIFICATION BASED ON ACID-CATALYZED DEPOLYMERIZATION
ITO, HIROSHI, ENGLAND, WILLIAM P., UEDA, MITSURU
Published in Journal of Photopolymer Science and Technology (1990)
Published in Journal of Photopolymer Science and Technology (1990)
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Journal Article