Preparation of large uniform amorphous silicon films by VHF-PECVD using a ladder-shaped antenna
Takeuchi, Yoshiaki, Nawata, Yoshikazu, Ogawa, Kazuhiko, Serizawa, Akira, Yamauchi, Yasuhiro, Murata, Masayoshi
Published in Thin solid films (15.05.2001)
Published in Thin solid films (15.05.2001)
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