CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
KIM, Sung Hyup, OH, Sang Yeon, CHOI, Ji Min, LEE, Ji Min, HONG, Eun Kyung, KOO, Nam Il, JEON, Ik Seon
Year of Publication 05.03.2020
Get full text
Year of Publication 05.03.2020
Patent
WAFER INSPECTION APPARATUS
PARK SOO-HWAN, KOO NAM-IL, NASSAU RACINE ELYSIA AUXTER, OH SANG-YEON, AHN TAE-HEUNG
Year of Publication 26.02.2021
Get full text
Year of Publication 26.02.2021
Patent
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
KIM SUNG-HYUP, KOO NAM-IL, JEON IK-SEON, OH SANG-YEON, CHOI JI-MIN, HONG EUN-KYUNG, LEE JI-MIN
Year of Publication 10.03.2020
Get full text
Year of Publication 10.03.2020
Patent
SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS INCLUDING SAME
OH SANG YEON, KIM MIN SUNG, KIM YI HWAN, HAN SANG CHUL, KIM BYEONG SANG, LEE JI HYEONG
Year of Publication 29.05.2024
Get full text
Year of Publication 29.05.2024
Patent
Immersion photolithographic system
OH SANG YEON, KIM HYOUNGSOO, KOO NAM IL, LEE WON KI, YOON JONG MIN, LEE GILGU, RYU JUNILL, PARK SU HWAN
Year of Publication 13.05.2024
Get full text
Year of Publication 13.05.2024
Patent
CHEMICAL MECHANICAL POLISHING APPARATUS
OH SANG YEON, JEON IK SEON, KIM SUNG HYUP, CHOI JI MIN, KOO NAM IL, HONG EUN KYUNG, LEE JI MIN
Year of Publication 11.03.2020
Get full text
Year of Publication 11.03.2020
Patent