Alternating hardmasks for tight-pitch line formation
Felix, Nelson M, Liu, Chi-Chun, Burns, Sean D, Mignot, Yann A. M, Sieg, Stuart A
Year of Publication 21.03.2023
Get full text
Year of Publication 21.03.2023
Patent
Alternating hardmasks for tight-pitch line formation
Felix, Nelson M, Liu, Chi-Chun, Burns, Sean D, Mignot, Yann A. M, Sieg, Stuart A
Year of Publication 08.06.2021
Get full text
Year of Publication 08.06.2021
Patent
Efficient metal-insulator-metal capacitor
Jagannathan, Hemanth, Liu, Chi-Chun, Tang, Hao, Estrada-Raygoza, Isabel C, Chung, Kisup, Mignot, Yann A. M
Year of Publication 13.04.2021
Get full text
Year of Publication 13.04.2021
Patent
Alternating hardmasks for tight-pitch line formation
Felix, Nelson M, Liu, Chi-Chun, Burns, Sean D, Mignot, Yann A. M, Sieg, Stuart A
Year of Publication 10.09.2019
Get full text
Year of Publication 10.09.2019
Patent
Efficient metal-insulator-metal capacitor
Jagannathan, Hemanth, Liu, Chi-Chun, Tang, Hao, Estrada-Raygoza, Isabel C, Chung, Kisup, Mignot, Yann A. M
Year of Publication 12.05.2020
Get full text
Year of Publication 12.05.2020
Patent
Alternating hardmasks for tight-pitch line formation
Felix, Nelson M, Liu, Chi-Chun, Burns, Sean D, Mignot, Yann A. M, Sieg, Stuart A
Year of Publication 04.06.2019
Get full text
Year of Publication 04.06.2019
Patent
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Clevenger, Lawrence A, Saulnier, Nicole A, Penny, Christopher J, Quon, Roger A, Burns, Sean D, Colburn, Matthew E, Mignot, Yann A. M, Kanakasabapathy, Sivananda K
Year of Publication 23.03.2021
Get full text
Year of Publication 23.03.2021
Patent
Alternating hardmasks for tight-pitch line formation
Arnold, John C, Felix, Nelson M, Liu, Chi-Chun, DeSilva, Anuja E, Mignot, Yann A. M, Sieg, Stuart A
Year of Publication 03.03.2020
Get full text
Year of Publication 03.03.2020
Patent
Hard masks for block patterning
Xu, Yongan, Seshadri, Indira P. V, De Silva, Ekmini A, Estrada-Raygoza, Isabel C, Mignot, Yann A. M
Year of Publication 16.07.2019
Get full text
Year of Publication 16.07.2019
Patent
Efficient metal-insulator-metal capacitor fabrication
Jagannathan, Hemanth, Liu, Chi-Chun, Tang, Hao, Estrada-Raygoza, Isabel C, Chung, Kisup, Mignot, Yann A. M
Year of Publication 09.04.2019
Get full text
Year of Publication 09.04.2019
Patent
Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Clevenger, Lawrence A, Saulnier, Nicole A, Penny, Christopher J, Quon, Roger A, Burns, Sean D, Colburn, Matthew E, Mignot, Yann A. M, Kanakasabapathy, Sivananda K
Year of Publication 28.01.2020
Get full text
Year of Publication 28.01.2020
Patent