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ULTRALOW DIELECTRIC CONSTANT LAYER WITH CONTROLLED BIAXIAL STRESS
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VERFAHREN ZUR HERSTELLUNG VON DIELEKTRISCHEN ZWISCHENSCHICHTEN MIT NIEDRIGER DIELEKTRIZITÄTSKONSTANTE FÜR BEOL- VERBINDUNGSLEITUNGEN MIT VERBESSERTER HAFTUNG UND NIEDRIGER FEHLERDICHTE
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Year of Publication 25.02.2004
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Year of Publication 25.02.2004
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METHOD OF FABRICATING LOW-DIELECTRIC CONSTANT INTERLEVEL DIELECTRIC FILMS FOR BEOL INTERCONNECTS WITH ENHANCED ADHESION AND LOW-DEFECT DENSITY
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Year of Publication 18.12.2003
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Year of Publication 31.10.2002
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Method of fabricating low-dielectric constant interlevel dielectric films for BEOL interconnects with enhanced adhesion and low-defect density
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Year of Publication 21.02.2000
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