Pressure sensor and manufacturing method thereof
YANG, QING-LI, LI, ZHAO-XING, ZHANG, FENG, HU, LEI, PENG, ZHEN, ZHAO, DI, SUI, CHEN, DENG, BO-WEN, MOU, CHANG-HUA, LI, XIAO, WANG, QI
Year of Publication 16.11.2023
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Year of Publication 16.11.2023
Patent