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"CATABAY, Wilbur"
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Search Results - "CATABAY, Wilbur"
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"CATABAY, Wilbur"
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Method for forming a low K dielectric composite layer in integrated circuits structures
by
Catabay
,
Wilbur
G
,
Schinella, Richard
Year of Publication
30.01.2019
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Low dielectric constant silicon oxide-based dielectric layer for integrated circuit structures having improved compatibility with via filler materials, and method of making same
by
Li, Weidan
,
Catabay
,
Wilbur
G
,
Zhao, Joe
,
Hsia, Wei-Jen
Year of Publication
23.01.2019
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Bi-axial texturing of high-K dielectric films to reduce leakage currents
by
Lo, Wai
,
Sun, Sey-Shing
,
Catabay
,
Wilbur
Year of Publication
07.06.2011
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Electro chemical mechanical polishing method and device for planarizing semiconductor surfaces
by
ZHU MEI
,
CATABAY WILBUR
G
Year of Publication
23.10.2007
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Electro chemical mechanical polishing method and device for planarizing semiconductor surfaces
by
Zhu, Mei
,
Catabay
,
Wilbur
G
Year of Publication
23.10.2007
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Bi-axial texturing of high-K dielectric films to reduce leakage currents
by
Lo, Wai
,
Sun, Sey-Shing
,
Catabay
,
Wilbur
Year of Publication
17.11.2009
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Diamond barrier layer
by
Catabay
,
Wilbur
,
Wang, Zhihai
Year of Publication
03.04.2003
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Dielectric barrier layer for increasing electromigration lifetimes in copper interconnect structures
by
Cui, Hao
,
Burke, Peter A
,
Catabay
,
Wilbur
G
Year of Publication
25.10.2011
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Dielectric barrier layer for increasing electromigration lifetimes in copper interconnect structures
by
CUI HAO
,
CATABAY WILBUR
G
,
BURKE PETER A
Year of Publication
25.10.2011
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Low k dielectric composite layer for integrated circuit structure which provides void-free low k dielectric material between metal lines while mitigating via poisoning
by
Catabay
,
Wilbur
,
Schinella, Richard
Year of Publication
05.09.2002
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Bi-axial texturing of high-K dielectric films to reduce leakage currents
by
LO WAI
,
SUN SEY-SHING
,
CATABAY WILBUR
Year of Publication
07.06.2011
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Viscous electropolishing system
by
SUKHAREV VALERIY
,
CATABAY WILBUR
G
Year of Publication
30.08.2005
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Viscous electropolishing system
by
Sukharev, Valeriy
,
Catabay
,
Wilbur
G
Year of Publication
30.08.2005
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Multi-step process for forming a barrier film for use in copper layer formation
by
Catabay
,
Wilbur
G
,
Wang, Zhihai
,
Li, Ping
Year of Publication
19.08.2008
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Electro chemical mechanical polishing method
by
ZHU MEI
,
CATABAY WILBUR
G
Year of Publication
22.02.2005
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Electro chemical mechanical polishing method
by
Zhu, Mei
,
Catabay
,
Wilbur
G
Year of Publication
22.02.2005
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Low k dielectric composite layer for integrated circuit structure which provides void-free low k dielectric material between metal lines while mitigating via poisoning
by
Catabay
,
Wilbur
G
,
Schinella, Richard
Year of Publication
05.10.2004
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Low k dielectric composite layer for integrated circuit structure which provides void-free low k dielectric material between metal lines while mitigating via poisoning
by
CATABAY WILBUR
G
,
SCHINELLA RICHARD
Year of Publication
05.10.2004
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DIELECTRIC BARRIER LAYER FOR INCREASING ELECTROMIGRATION LIFETIMES IN COPPER INTERCONNECT STRUCTURES
by
CUI HAO
,
CATABAY WILBUR
G
,
BURKE PETER A
Year of Publication
12.08.2010
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Diamond barrier layer
by
CATABAY WILBUR
G
,
WANG ZHIHAI
Year of Publication
11.05.2004
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