Simultaneous qualitative analysis of volatile and nonvolatile organic contamination on silicon wafer by online pyrolysis mass spectrometry
Ketola, R.A., Kiuru, J., Tarkiainen, V., Kiviranta, A., Rasanen, J., Ritala, H., Eranen, S.
Published in IEEE transactions on device and materials reliability (01.12.2005)
Published in IEEE transactions on device and materials reliability (01.12.2005)
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