Inductively coupled plasma reactive ion etching of ZnO films in HBr/Ar plasma
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Conference Proceeding
High Density Plasma Etching of Nickel Thin Films Using a Cl2/Ar Plasma
정지원, Han Na Cho, Su Ryun Min, Hyung Jin Bae, Jung Hyun Lee
Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.11.2007)
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Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.11.2007)
Journal Article
High-density plasma etching of CoFeSiB magnetic films with hard mask
Woo Lee, Jang, Ryun Min, Su, Wan Kim, Tae, Won Chung, Chee
Published in Journal of magnetism and magnetic materials (01.09.2006)
Published in Journal of magnetism and magnetic materials (01.09.2006)
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Journal Article
Inductively coupled plasma reactive ion etching of titanium nitride thin films in a Cl2/Ar plasma
Min, Su Ryun, Cho, Han Na, Li, Yue Long, Lim, Sung Keun, Choi, Seung Pil, Chung, Chee Won
Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.05.2008)
Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.05.2008)
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Journal Article
Optical and Electrical Properties of RF-Sputtered Indium Zinc Oxide Films
정지원, Yue Long Li, Han Na Cho, Su Ryun Min, Sung Keun Lim
Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.09.2007)
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Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.09.2007)
Journal Article
Etch characteristics of magnetic tunnel junction stack with nanometer-sized patterns for magnetic random access memory
Min, Su Ryun, Cho, Han Na, Kim, Kee Won, Cho, Young Jin, Choa, Sung-Hoon, Chung, Chee Won
Published in Thin solid films (01.04.2008)
Published in Thin solid films (01.04.2008)
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Journal Article
Conference Proceeding
Inductively coupled plasma reactive ion etching of titanium nitride thin films in a Cl 2/Ar plasma
Min, Su Ryun, Cho, Han Na, Li, Yue Long, Lim, Sung Keun, Choi, Seung Pil, Chung, Chee Won
Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.05.2008)
Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.05.2008)
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Journal Article
Etch characteristics of magnetic tunnel junction stack using a high density plasma in a HBr/Ar gas
Min, Su Ryun, Cho, Han Na, Noh, Su Jin, Kim, Kee Won, Seo, Sun Ae, Chung, Chee Won
Published in Physica status solidi. C (01.12.2007)
Published in Physica status solidi. C (01.12.2007)
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Inductively Coupled Plasma Reactive Ion Etching of GeSbTe Thin Films in a HBr/Ar Gas
LEE, JANG WOO, CHO, HAN NA, MIN, SU RYUN, CHUNG, CHEE WON
Published in Integrated ferroelectrics (19.04.2007)
Published in Integrated ferroelectrics (19.04.2007)
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Journal Article
HIGH DENSITY PLASMA ETCHING OF IrRu THIN FILMS AS A NEW ELECTRODE FOR FeRAM
LEE, JANG WOO, MIN, SU RYUN, CHO, HAN NA, CHUNG, CHEE WON
Published in Integrated ferroelectrics (01.01.2006)
Published in Integrated ferroelectrics (01.01.2006)
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