Enhanced EM endurance of TiN/AlCu/TiN/sub x/ interconnection
Jeong Soo Byun, Jun Ki Kim, Kwan Goo Rha, Woo Shik Kim
Published in Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS) (1994)
Published in Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS) (1994)
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