A highly manufacturable MIPS (metal inserted poly-Si stack) technology with novel threshold voltage control
Hyung-Suk Jung, Jong-Ho Lee, Sung Kee Han, Yun-Seok Kim, Ha Jin Lim, Min Joo Kim, Seok Joo Doh, Mi Young Yu, Nae-In Lee, Hye-Lan Lee, Taek-Soo Jeon, Hag-Ju Cho, Sang Bom Kang, Sang Yong Kim, Im Soo Park, Dongchan Kim, Hion Suck Baik, Young Su Chung
Published in Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005 (2005)
Published in Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005 (2005)
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Conference Proceeding
Highly Manufacturable TiN Metal Gate Nanorod Transistors Realized on Silicon-On-ONO (SOONO) Substrate
Sung Hwan Kim, Chang Woo Oh, Yong Lack Choi, Sung-In Hong, Na Young Kim, Hyun Jun Bae, Sung-Han Kim, Heung Sik Park, Je Bum Yoon, Im Soo Park, Dong-Won Kim, Donggun Park, Byung-Il Ryu
Published in 2006 International Electron Devices Meeting (01.12.2006)
Published in 2006 International Electron Devices Meeting (01.12.2006)
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Conference Proceeding