Large Size Dislocation-Free Gallium Arsenide Single Crystals for LSI Applications
Orito, Fumio, Seta, Yuichi, Yamada, Yutaka, Ibuka, Toshihiko, Okano, Takeshi, Hyuga, Fumiaki, Osaka, Jiro
Published in 1986 IEEE GaAs IC Symposium Technical Digest (01.10.1986)
Published in 1986 IEEE GaAs IC Symposium Technical Digest (01.10.1986)
Get full text
Conference Proceeding