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A nanochannel fabrication technique using chemical-mechanical polishing (CMP) and thermal oxidation
by
Choonsup Lee
,
Yang, E.H.
,
Myung, N.V.
,
George, T.
Published in
2003 Third IEEE Conference on Nanotechnology, 2003. IEEE-NANO 2003
(2003)
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Conference Proceeding
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chemistry
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engineering
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physics
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amorphous silicon
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chemical technology
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chemistry
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chemistry, applied
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cmos process
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IEL
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