Design and implementation of a CMOS-MEMS microphone without the back-plate
Wei-Jhih Mao, Chao-Lin Cheng, Sung-Cheng Lo, You-Siang Chen, Weileun Fang
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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