Highly reliable vertical NAND technology with biconcave shaped storage layer and leakage controllable offset structure
Won-seok Cho, Sun Il Shim, Jaehoon Jang, Hoo-sung Cho, Byoung-Koan You, Byoung-Keun Son, Ki-hyun Kim, Jae-Joo Shim, Choul-min Park, Jin-soo Lim, Kyoung-Hoon Kim, De-will Chung, Ju-Young Lim, Hui-Chang Moon, Sung-min Hwang, Hyun-seok Lim, Han-Soo Kim, Jungdal Choi, Chilhee Chung
Published in 2010 Symposium on VLSI Technology (01.06.2010)
Published in 2010 Symposium on VLSI Technology (01.06.2010)
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Conference Proceeding
PMD (preferential metal deposition) aluminum process for 16 giga-bit DRAM and beyond
Meeyoung Yoon, Hyun Seek Lim, Sang Bom Kang, Gil-Heyun Choi, Sang In Lee, Moon Young Lee
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
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Conference Proceeding