MEMS technology development and manufacturing in a CMOS foundry
Liu, C.M., Lin, Chung-Hsien, Chung, Tien-Kan, Chang, Kuei-Sung, Liu, Yi-Shao, Chou, Bruce C.S., Tsai, Robert Chin-Fu, Shen, Nick Y.M., Chen, Benior S.F., Cheng, Emerson C.W., Tuan, Hsiao Chin, Kalnitsky, Alex, Cheng, Sean
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
Published in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2011)
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Conference Proceeding
In-situ chemical vapor deposition of alumina catalyst bed on a suspended membrane microreactor
Takahashi, T., Tanaka, S., Kuei-Sung Chang, Esashi, M.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)
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Conference Proceeding