Extension of CD-TEM towards EDS Tomography
Baumann, Frieder H., Popielarski, Brian, Lu, Yinggang
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
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Conference Proceeding
Spring-lattice model for fast, flexible and easy strain prediction in semiconductor devices ET/ID: Enabling technologies and innovative devices
Baumann, Frieder H., Guinel, Maxime J-F
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2017)
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Conference Proceeding