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Search Results - 直流电表面目标磁电管反应溅射法
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Fabrication and Characterization of VO2 Thin Films by Direct Current Facing Targets Magnetron Sputtering and Low Temperature Oxidation
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梁继然 胡明 刘志刚 韩雷 陈涛
Published in
Transactions of Tianjin University
(01.06.2008)
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Journal Article
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engineering
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direct current facing targets magnetron sputtering
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engineering
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humanities and social sciences
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low temperature oxidation
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mechanical engineering
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microstructure
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