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一种改善磁控溅射薄膜膜厚均匀性的工艺方法、磁控溅射薄膜和磁控溅射设备

Year of Publication 01.08.2025

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Patent

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一种基于溅射薄膜芯体的微小体积压力传感器

Year of Publication 02.09.2025

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Patent

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一种真空磁控溅射薄膜镀制设备

Year of Publication 29.08.2025

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Patent

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溅射薄膜压力芯体组件、压力传感器及封装方法

Year of Publication 15.08.2025

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Patent

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一种基于溅射薄膜芯体的高温高压传感器

Year of Publication 12.08.2025

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Patent

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一种减少晶圆表面损伤的卧式磁控溅射薄膜沉积设备

Year of Publication 04.03.2025

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Patent

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一种靶材、磁控溅射装置及溅射方法、溅射薄膜

Year of Publication 22.08.2023

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Patent

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溅射薄膜绝压传感器芯体及其制备方法

Year of Publication 05.07.2024

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Patent

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一种绝压式溅射薄膜压力传感器封装结构及方法

Year of Publication 06.02.2024

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Patent

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锶钛合金制备方法、基于合金的靶材及磁控溅射薄膜

Year of Publication 27.02.2024

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Patent

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一种离子束溅射薄膜高温应变片及其制备方法

Year of Publication 19.12.2023

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Patent

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一种全无机锡基钙钛矿粉体、靶材以及磁控溅射薄膜及其制备方法

Year of Publication 11.07.2025

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Patent

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一种掺铌钛酸锶靶材的制备方法、靶材及磁控溅射薄膜

Year of Publication 05.01.2024

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Patent

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用于煤制气环境中的溅射薄膜敏感元件

Year of Publication 04.10.2022

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Patent

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种溅射薄膜压力传感器

Year of Publication 11.12.2018

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Patent

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一种溅射薄膜压力变送器

Year of Publication 25.09.2020

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Patent

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一种耐超高电压溅射薄膜压力变送器及制造方法

Year of Publication 24.06.2022

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Patent

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基于金属溅射薄膜技术的烧蚀传感器

Year of Publication 15.11.2019

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Patent

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旋翼轴承内圈内壁高功率磁控溅射薄膜沉积装置及方法

Year of Publication 03.06.2022

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Patent

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一种真空磁控溅射薄膜镀制设备

Year of Publication 20.04.2021

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Patent

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