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Method for depositing metal nitride
CHEN YUCHANG, SHEN CHENGXU, LIU PENGJIE, YANG RUNQING, XU CAN, GAO YE
Year of Publication 24.06.2025
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Year of Publication 24.06.2025
Patent
Boron nitride for mask patterning
YU HANG, ZHU SIYU, FU QIAN, YANG XIAWAN, KIM JEONG-WHAN, YANG CHUANXI, PADHI DEENESH, GUO LIANZHU
Year of Publication 29.03.2024
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Year of Publication 29.03.2024
Patent
Stretched nitride deposition systems and methods
XIA LIQUN, LIN YAKANG, LIU YANG, PADHI DEENESH, XIAO KAI, TSIANG MICHAEL WENYOUNG, YU HUA
Year of Publication 22.08.2023
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Year of Publication 22.08.2023
Patent
Systems and methods for depositing high density and high tensile stress films
WONG CHEE YEE, KAMATH SANJAY G, KHOO ANDREW, YANG YANG, YANG CHUANXI, PADHI DEENESH, YU HUA, HAN XINHAI
Year of Publication 23.06.2023
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Year of Publication 23.06.2023
Patent
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
SATO TATSUYA, CHU DAVID, LIU PATRICIA M, CHU CHARLES, CHEN SHIHUNG, BEVAN MALCOLM J, SWENBERG JOHANES, HUNG STEVEN C
Year of Publication 18.02.2022
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Year of Publication 18.02.2022
Patent
MODIFIED STACK FOR 3D NAND
WONG CHEE YEE, MAHER JOHN, LEUNG PAMELA L, ZHONG QUINN ERIC, HU KESONG, JAIN ANKIT, ENSLOW KAREN, YU HUA, OGATA MASAKI, YANG CHUANXI, RAJAGOPALAN NAGARAJAN, PADHI DEENESH, HAN XINHAI, WANG WENJIAO, LI, SHIPENG
Year of Publication 29.04.2022
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Year of Publication 29.04.2022
Patent