Semiconductor safety handbook safety and health in the semiconductor industry
The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH & S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH & S in t...
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Other Authors | |
---|---|
Format | Electronic eBook |
Language | English |
Published |
Westwood, N.J. :
Noyes Publications,
c1998.
|
Series | Semiconductor safety series.
|
Subjects | |
Online Access | Plný text |
Cover
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Table of Contents:
- Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies
- Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention
- Chemical Hazards in Semiconductor Operations
- Industrial Hygiene
- Electrical Hazards
- Radiation Safety
- Recognition, Evaluation and Control of Some Plasma Processing Hazards
- Fire Protection Technology for Semiconductor Operations
- Building and Fire Codes Impacting the Semiconductor Industry
- Gases and Gas Equipment
- Toxic Gas Monitoring
- References
- Index.